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It's All About The Chemistry:
Blue LEDs
have been getting much attention over the past few years because their
production had researchers stumped. How did they finally produce blue
LEDs? This article will discuss some of the interesting details of blue
diode fabrication.
InGaN films with a high amount of indium are needed to
produce blue LEDs. Gallium nitride platelets can be used but is
difficult to fabricate. Some other choices are sapphire, aluminum nitride
(AIN) and silicon carbide (SiC). The major reason sapphire would be
abandoned is the dislocation density created by a large lattice mismatch
when using gallium nitride. AlN is more desirable because it matches the
crystalline structure of GaN. One of the advantages of using SiC is it
draws heat from the PN junction at ten times the rate of sapphire, and
SiC's natural cleave plane can channel energy from a blue emitting
device. Despite this, sapphire is used simply because it is widely
available, needs no special equipment to use, and needs no complex
cleaning procedures before growth is begun.
The problem with the lattice mismatch occurs between the
substrate and active layers of the PN junction, but lateral epitaxial
overgrowth is the desired method to minimize these dislocation defects.
Lateral epitaxial overgrowth is a process where parts of the sapphire
substrate are masked and then GaN is grown on top of it. Ultraviolet
photolithography and wet chemical etching are used to partially remove
the mask before the GaN can be grown. (However, wet etching is slow but
good for reducing density).
After the correct chemicals have been determined and the
epitaxial process has been done, crystals must be grown so the blue
diode can finally be used. The first step is making the buffer layer. It
is grown after the substrate wafers are etched in buffered HG for one
minute. This takes place at 900 degrees C using the Metal Organic
Chemical Vapor Deposition (MOCVD) process. The GaN starts to come
together through a nucleation stage of epitaxial growth. The third step
is geometric selection, then the small nuclides fuse to form an island.
Then, the islands expand to cover the buffer area. Lastly, they form
crystalline planes. Once this is made, it is doped into the P/N
junction.
The brightest LEDs are either single or multiple
quantum well structures and consists of a low temperature GaN or AlN
buffer layer on a c-plane sapphire or silicon-doped GaN layers. Blue
LEDs are III-V nitride products that are based on either a SQW or MQW
structure, which vastly improves the efficiency and color purity. The
width of the spectrum for these lamps is narrower than the Zn-Si co-doped
LEDs before them, which makes much better color saturation. With this
technology, there are now solid state LED colors that span the entire
spectrum.
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